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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

Brand Name : KYKY

Model Number : CXF-200/1401E

Certification : CE

Place of Origin : China

MOQ : 1

Payment Terms : T/T, L/C

Delivery Time : 4weeks

Packaging Details : Wooden box for overseas shipment

Pumping Speed : 1401L/s

lubrication : Maglev

Flange : ISO-F/CF 200

Cooling : Water

name : Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

keyword : Turbo Molecular Pump

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Maglev Pump , CXF-200/1401 , Water cooling , On board

series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51

Product Tags:

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chip manufacturing molecular vacuum pump

      

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Wholesale Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing from china suppliers

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